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超精气磁轴承混合轴系的研究
引用本文:刘暾,葛卫平,齐乃明,费源明. 超精气磁轴承混合轴系的研究[J]. 中国机械工程, 2002, 13(2): 167-170
作者姓名:刘暾  葛卫平  齐乃明  费源明
作者单位:哈尔滨工业大学,哈尔滨市,150001
基金项目:国家自然科学基金资助项目 ( 5 9675 0 65 )
摘    要:提出一种提高轴系回转精度的方法,即气体轴承作为主要承载元件,由磁轴承修正气体轴承的误差和外界干扰的影响,达到超高精度,介绍了试验方案和试验结果。将气体轴承轴系的原有(磁轴承未工作)的径向振摆从0.25um,提高到(磁轴承工作后)0.04um左右。

关 键 词:气体静压轴承 主动磁轴承 轴系 回转精度
文章编号:1004-132X(2002)02-0164-03

Investigation of Super-precision Shafting Contained by Gas and Magnetic Bearings
LIU Tun. Investigation of Super-precision Shafting Contained by Gas and Magnetic Bearings[J]. China Mechanical Engineering, 2002, 13(2): 167-170
Authors:LIU Tun
Abstract:This paper suggests an approach to improve rotary accuracy of rotating shafting, here gas bearings were used as the main supporting elements and active magnetic ones to compensate the errors of gas bearings and other disturbances, thus super-precision was achieved.The experimental scheme and results are introduced. The precision of gas and magnetic bearing shafting has been improved from the original runout 0 25 micrometer under which the magnetic bearings can not work to about 0 04 micrometer where the magnetic bearings take part in control.
Keywords:gas bearing active magnetic bearing rotary accuracy of rotating shafting
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