| 波导光互连的研究进展 |
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| 引用本文： | 严蓉,吴丰顺,刘辉,莫丽萍,姜雪飞,彭卫红.波导光互连的研究进展[J].电子工艺技术,2010,31(6). |
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| 作者姓名： | 严蓉 吴丰顺 刘辉 莫丽萍 姜雪飞 彭卫红 |
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| 作者单位： | 武汉光电国家实验室;华中科技大学材料成形及模具国家重点实验室;深圳崇达多层线路板有限公司; |
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| 摘 要： | 介绍了波导光互连的研究现状及发展趋势.波导光互连研究主要包括波导结构的成形、微反光镜的制作、功能结构的设计以及可靠性测试,应用前景广阔,是今后几年光互连技术的研究重点之一.然而波导光互连也面临着很大的挑战:廉价材料和工艺的选择,性能与可靠性的完善,互连密度的提高与可靠性的协调,3D封装以及标准化与产业化等.
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| 关 键 词： | 光互连 波导 微光镜 3D封装 |
Research Progress of Waveguide Optical Interconnection |
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| YAN Rong,WU Feng-shun,LIU Hui,MO Li-ping,JIANG Xue-fei,PENG Wei-hong.Research Progress of Waveguide Optical Interconnection[J].Electronics Process Technology,2010,31(6). |
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| Authors: | YAN Rong WU Feng-shun LIU Hui MO Li-ping JIANG Xue-fei PENG Wei-hong |
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| Affiliation: | YAN Rong 1,WU Feng-shun1,2,LIU Hui2,MO Li-ping2,JIANG Xue-fei3,PENG Wei-hong3(1.Wuhan National Laboratory for Optoelectronics,2.State Key Laboratory of Materials Processing and Die & Mould Technology in Huazhong Univ of S&T,Wuhan 430074,China,3.Shenzhen Suntak Mutilayer Co.,Shenzhen 518132,China) |
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| Abstract: | Research and development of waveguide optical interconnection are described.Waveguide optical interconnection includes waveguide structure forming,process of micro-mirror structure,functional structure design and reliability test.Owning extensive application prospect,waveguide optical interconnection becomes one of the research key points for next few years.However,there still has great challenges existed,e.g.choosing of low-cost materials and processes,improvement on performance,and compromise between dens... |
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| Keywords: | Optical interconnection Waveguide Micro-mirror 3 Dimensional Packaging |
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