Affiliation: | (1) Department of Electrical Engineering, National Cheng Kung University, Tainan, 701, Taiwan;(2) Institute of Nanotechnology and Microsystems Engineering, National Cheng Kung University, Tainan, 701, Taiwan;(3) Department of Engineering Science, National Cheng Kung University, Tainan, 701, Taiwan;(4) Department of Mechanical and Automation Engineering, I-Shou University, Kaohsiung County, 840, Taiwan;(5) Medical Electronics and Device Technology Center, Industrial Technology Research Institute, Hsinchu, 310, Taiwan; |