稀土超磁致伸缩微致动器设计与实验

作为微制造平台主动隔振系统微致动器核心部件,超磁致伸缩微致动器的工作性能将直接影响整个系统的控制精度.选择Terfenol-D作为微致动器主要材料,设计了一种新型超磁致伸缩微致动器.电磁结构设计中,采用电磁场解析计算进行初步设计,进而采用有限元法对致动器的结构和线圈参数进行进一步的分析与优化.静态特性实验结果表明,该微致动器具有较大的静态位移输出、力输出及较小的位移滞回.

Design and experimental study of a micro-displacement actuator based on giant magnetostrictive material

As the key component of a precision isolation system, the giant magnetostrictive actuator's properties have great effect on isolation system performance. Based on the characteristics of the giant magnetostrictive material, a kind of magnetostrictive actuator applied with giant magnetostrictive material homemade is investigated. The magnetic circuit structure of actuator is designed by analysis method. The structure and parameters are analyzed and optimized by electromagnetic field FEM. After that, the static characteristic experiments are implemented. Results show that the static outputs of displacement and force are rather high, and the displacement hysteresis is little.