Thermo-optically tunable arrayed-waveguide-grating made of polymer/Si

A 33×33 thermo-optically tunable arrayed-waveguide-grating (AWG) has been fabricated by using the poly (2, 3, 4, 5, 6-pentafluorostyrene-co-glycidylmethacrylate) (PFS-co-GMA). The technological process of the fabrication of the device is described, and the measured results are presented. The measured spacing of the wavelength channel is about 0.81 nm, the 3-dB bandwidth is about 0.35 nm, the crosstalk is about −20 dB, and the insertion loss is between 10.4 dB for the centre port and 11.9 dB for the edge port. The measured thermo — optical tunable shift is about −0.12 nm/K. The measured center wavelength is 1545.21–1551.81 nm in the temperature range from 10°C to 65°C, and the tuning range is 6.6 nm. Supported by National Science Foundation of China (60576045, 60507004)