|
|||||
|
|
Cluster beams from a Co---Nd liquid alloy ion source |
|
| Authors: | L. Bischoff J. Teichert E. Hesse P. D. Prewett J. G. Watson |
| Affiliation: | a Research Center Rossendorf Inc. Institute of Ion Beam Physics and Materials Research P.O. Box 51 01 19, D - 01314, Dresden, Germany b Central Microstructure Facility Rutherford Appleton Laboratory Chilton, Didcot, Oxon OX11 0QX;, UK |
| Abstract: | A Cobalt-Neodymium Liquid Alloy Ion Source (LAIS) is investigated with respect to its cluster emission behaviour. Clusters and molecular ions were found. The influence of the source emission current on the cluster emission intensity and also on the cluster mass distribution is studied. The Co---Nd LAIS was used for writing patterning (implantation, sputtering) in a mass-selecting Focused Cluster Beam (FCB) system. Theoretical estimations were carried out concerning the use of the FCB for direct deposition at landing energies of about 100 eV / atom. First experimental results of cobalt FCBs are presented. |
| Keywords: | |
| 本文献已被 ScienceDirect 等数据库收录！ | |