| 含氟电子气体研究进展 |
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| 引用本文： | 李盛姬,黄雪静,齐海,张建君.含氟电子气体研究进展[J].低温与特气,2013,31(1):1-5. |
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| 作者姓名： | 李盛姬 黄雪静 齐海 张建君 |
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| 作者单位： | 1. 浙江省化工研究院有限公司,浙江杭州,310023
2. 大庆油田采油工程研究院,黑龙江大庆,163453 |
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| 摘 要： | 含氟电子气体在半导体／电子工业中主要用作清洗剂和蚀刻剂。综述了含氟电子气体品种、性能及其研究进展，指出研究方向与新一代含氟电子气体，以供同仁参考。
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| 关 键 词： | 电子气体 清洗剂 氟化工 半导体 |
State-of-the-Art of Fluorinated Cleaning Gases Used in Semiconductor Industry |
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| LI Shengji
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HUANG Xuejing
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QI Hai
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ZHANG Jianjun.State-of-the-Art of Fluorinated Cleaning Gases Used in Semiconductor Industry[J].Low Temperature and Specialty Gases,2013,31(1):1-5. |
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| Authors: | LI Shengji HUANG Xuejing QI Hai ZHANG Jianjun |
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| Affiliation: | 1(1.Zhejiang Chemical Industry Research Institute,Hangzhou 310023,China; 2.Production and Engineering Institute in Daqing Oilfield,Daqing 163453,China) |
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| Abstract: | Fluorinated electronic gases were mainly used in semiconductor/electrical industry. In this paper, the state of art of the fluorinated electronic gases was stated, including the different variety and performance. The research interests in future and the new kind of fluorinated electronic gases were pointed out. |
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| Keywords: | electronic gas etching cleaning fluorine chemical industry semiconductor |
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