| 电子束直写技术制作GHz频带声表面波器件 |
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| 引用本文： | 杨忠山,范子坤,田丰,韩立.电子束直写技术制作GHz频带声表面波器件[J].压电与声光,2005,27(6):606-609. |
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| 作者姓名： | 杨忠山 范子坤 田丰 韩立 |
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| 作者单位： | 1. 中国科学院电工研究所,北京,100080
2. 北京长峰声表面公司,北京,100854 |
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| 摘 要： | 电子束具有刻写微细图形尺寸的能力，容易实现亚微米宽格栅的声表面波器件制造，因此可达到器件的高频化和在设计上更具灵活性。该文介绍了器件图形的数据处理策略，基片的制备和工艺过程。描述了在电子束曝光过程中采取的一些独特方法，生产了性能良好的吉赫兹频带滤波器、谐振器和延迟线等声表面波器件。
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| 关 键 词： | 半导体工艺 声表波器件 电子束刻蚀技术 |
| 文章编号： | 1004-2474(2005)06-0606-04 |
| 收稿时间： | 2003-11-28 |
| 修稿时间： | 2003年11月28 |
Electron Beam Direct Writing Technology Applied for Fabrication of GHz Frequencies SAW Devices |
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| YANG Zhong-shan,FAN Zi-kun,TIAN Feng,HAN Li.Electron Beam Direct Writing Technology Applied for Fabrication of GHz Frequencies SAW Devices[J].Piezoelectrics & Acoustooptics,2005,27(6):606-609. |
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| Authors: | YANG Zhong-shan FAN Zi-kun TIAN Feng HAN Li |
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| Affiliation: | 1. Microfabrication Laboratory, Instiute of Electrical Engineering, Chinese Academy of Sciences, Beijing 100080, China; 2. Changfeng SAW Devises Company Beijing, Beijing 100854, China |
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| Abstract: | We have experienced fabrixation of surface acoustic waves(SAW)by using electron beam lithography tool directly.Since electron beam have capability of writing fine size of pattern SAW devices with submicron line/space gratings can be realized easily.Therefore the devices can reach high frequencies and have more flexibility in design.This paper introduced data processing strategies of pattern of the dveicse,substrate preparation and technique processes.Especially,some unique technologies are described during the electron beam exposure processing.Some GHz frequencies SAW devices with good qualities,such as filters,resonators and retarders have been produced. |
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| Keywords: | semiconductor tdeehnology SAW device electron beam lithography |
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