| 连续压入法评定等离子体增强化学气相沉积(PECVD)TiN膜基结合强度 |
| |
| 引用本文： | 谢飞,刘青林,易茂中,何家文.连续压入法评定等离子体增强化学气相沉积(PECVD)TiN膜基结合强度[J].江苏石油化工学院学报,1999(2). |
| |
| 作者姓名： | 谢飞 刘青林 易茂中 何家文 |
| |
| 作者单位： | 江苏石油化工学院机械工程系!常州213016(谢飞，刘青林)，西安交通大学材料工程学院!西安710049(易茂中，何家文) |
| |
| 摘 要： | 介绍了一种新型涂层压入仪。对比了压入法、划痕法、接触疲劳法测定不同处理基体、同类ＰＥＣＶＤ ＴｉＮ 膜基结合强度的变化规律。结果表明采用该压入仪， 运用连续加载压入法， 可方便地定性或半定量测定ＰＥＣＶＤ ＴｉＮ 膜基结合优劣。该法所测临界载荷Ｐｃ 不仅反映膜基结合的优劣， 还反映了膜基体系的承载能力。
|
| 关 键 词： | 膜基结合强度 压入法 氮化钛 等离子体增强化学气相沉积 |
The Assessment of the Bonding Strength between Plasma Enhanced Chemical Vapor Deposited TiN Films and the Substrate by Continuous Indentation |
| |
| Xie Fei,Liu Qinglin.The Assessment of the Bonding Strength between Plasma Enhanced Chemical Vapor Deposited TiN Films and the Substrate by Continuous Indentation[J].Journal of Jiangsu Institute of Petrochemical Technology,1999(2). |
| |
| Authors: | Xie Fei Liu Qinglin |
| |
| Abstract: | A new type of coating indenter is introduced.The testing results of bonding strength between a group of PECVD TiN films and differently treated substrates measured by indentation,scratching, and contact fatigue methods are compared.It is shown that this new continuous loading indenter is fit to qualitatively or quasi-quantitatively assess the bonding strength in a simple and practical way. It is noticed that the critical load, P c,reveals not only the property of the adhesion between the film and substrate, but also the loading capacity of the system. |
| |
| Keywords: | Bonding strength Indentation method TiN PECVD |
| 本文献已被 CNKI 等数据库收录！ |
