Ribbon growth on substrate (RGS) silicon solar cells with microwave-induced remote hydrogen plasma passivation and efficiencies exceeding 11% |
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Authors: | M Spiegel C Zechner B Bitnar G Hahn W Jooss P Fath G Willeke E Bucher H-U Höfs C Häßler |
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Affiliation: | aUniversity of Konstanz, Faculty of Physics, P.O. Box X916, D-78457 Konstanz, Germany;bBayer AG, Rheinuferstr. 7-9, D-47829 Krefeld-Uerdingen, Germany |
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Abstract: | For the first time efficiencies above 11% for solar cells (4 cm2) based on Bayer ribbon growth on substrate (RGS) crystalline silicon have been demonstrated including mechanical V-structuring of the front surface, aluminum-gettering, microwave-induced remote hydrogen plasma (MIRHP) passivation and PECVD SiN/SiO2 double-layer antireflection coating. MIRHP alone resulted in absolute improvements in the open-circuit voltage of 27 mV, in the short-circuit current density of 2.8 mA cm−2 and in the cell efficiency of 1.9% leading to an open-circuit voltage of 538 mV and an efficiency of 11.1%. |
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Keywords: | Hydrogen passivation Ribbon growth on substrate Multicrystalline silicon Solar cells |
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