Characterization of micromachined silicon rectangular waveguide at 400 GHz |
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| Authors: | Kirby PL Pukala D Manohara H Mehdi I Papapolymerou J |
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| Affiliation: | Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA; |
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| Abstract: | We present the first characterization of a micromachined silicon rectangular waveguide at 400GHz. The silicon waveguide has an average loss of 0.086dB/mm for a range of 350-460GHz. The waveguides are formed using well known microfabrication techniques and demonstrate a successful first step towards the use of silicon waveguides as a viable option for THz systems. |
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