芯片式光谱仪光束耦合与对准监测系统设计

针对芯片式光谱仪的光束耦合与对准监测难的问题，提出了一种集成光学系统，避免光纤与芯片式光谱仪接收端接触产生磨损；有效解决光纤遮挡导致无法监测耦合效果的问题。光学系统由耦合前部分系统、监测后部分系统和复合共用系统三部分组成，复合共用系统需同时配合耦合前部分系统与监测后部分系统分别完成光束耦合与对准监测的功能。采用多重组合方式对整体系统进行设计，针对6 μm入射光纤与20 μm×20 μm的芯片式光谱仪接收端，在（1 550±50） nm的工作谱段对光纤光束与芯片式光谱仪接收端耦合系统与监测系统进行了设计，并通过LightTools软件对耦合系统进行能量分析，计算耦合效率为0.733。整体系统结构简单且无需手动调节，可同时进行光束耦合与对准监测，为芯片式光谱仪的耦合及监测提供了一种新方法。

System design for beam coupling and alignment monitoring of chip spectrometer

Aiming at the problem of the beam coupling and alignment monitoring of the chip spectrometer, an integrated optical system was proposed for avoiding the wear of the receiving end at chip spectrometer and the shielding of the optical fiber. The system consisted of a front coupling system, a rear monitor system and a composite sharing system. The composite sharing system needed to cooperate with the front coupling system and the rear monitor system to complete the beam coupling and alignment monitoring functions respectively. The final system was designed by multiple combinations, a coupling system and a monitoring system were designed for a 6 μm incident fiber and a 20 μm×20 μm chip spectrometer receiving end at (1 550±50) nm. The energy analysis of the coupled system was performed by LightTools. The coupling efficiency was 0.733. The final system has a simple structure and can perform beam coupling and alignment monitoring at the same time, which provides a new method for the beam coupling and monitoring of chip spectrometers.