飞秒激光诱导金刚石微纳结构及其应用（特邀）

多年来，硅和锗一直被认为是合适制造探测器和集成光电器件的半导体材料。然而，与金刚石基器件相比，这种四价半导体的抗辐射损伤能力较差，而且在恶劣条件或高强光辐照下，器件的稳定性较差。近年来，金刚石因其优异的光学与力学性能，在集成光子学、传感和量子光学等领域展现了巨大的应用前景。利用激光诱导金刚石微纳结构为开发金刚石上的三维光互联器件、全碳探测器、石墨电阻以及单光子源的实现提供了一种有潜力的制备方法。阐述了飞秒激光诱导金刚石色心形成、石墨化和折射率变化的物理机制，在此基础上，进一步探究了飞秒激光诱导金刚石微纳结构在单光子源、传感器和光波导等方面的应用，并对未来发展趋势进行了展望。

Femtosecond laser induced microstructures in diamond and applications (Invited)

For many years, silicon and germanium have been considered the suited semiconductor materials for detectors and integrated optoelectronic devices fabrication. However, compared with diamond-based devices, such tetravalent semiconductors are less resistant to radiation damage, and the devices are less stable under harsh conditions or under high-energy light radiation. In recent years, due to the excellent optical and mechanical properties, diamond has become a promising material in the application of integrated photonics, sensors, and quantum optics etc. The laser-induced microstructures of diamond represents a powerful tool used for the development optical 3D-contacts devices all-carbon detectors graphite resistors on diamond, as well as the realization of single photon source. The physical mechanisms of femtosecond laser induced color center, graphitization and refractive index change in diamond were demonstrated. Based on this, the applications of the femtosecond laser induced micro-nano structures in diamond for single photon source, sensor and optical waveguide were introduced. Then, the future developing tendency in this field was prospected.