| 光纤连接器端面的显微干涉测试系统 |
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| 引用本文： | 李路,王鸣.光纤连接器端面的显微干涉测试系统[J].南京师范大学学报,2009,9(1):84-87. |
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| 作者姓名： | 李路 王鸣 |
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| 作者单位： | 南京师范大学,物理科学与技术学院,江苏,南京,210097
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| 摘 要： | 介绍了一种基于显微干涉的光纤连接器端面的测试系统，干涉仪由Mirau干涉物镜和镜筒透镜组成，CCD相机采集干涉图样，经处理后得到相位分布图．采用Carre相位提取算法，无需进行特定步长的相移．对光纤连接器端面的表面形貌、曲率半径、顶点偏移进行测量，测量系统的横向分辨率可达到0．9μm，重复性测量精度为9．5nm．
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| 关 键 词： | 光纤连接器 显微干涉 Mirau物镜 相移干涉 相位提取 |
A Testing System for Optical Fiber Connector End Surface Based on Microscopic Interferometry |
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| Li Lu,Wang Ming.A Testing System for Optical Fiber Connector End Surface Based on Microscopic Interferometry[J].Journal of Nanjing Nor Univ: Eng and Technol,2009,9(1):84-87. |
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| Authors: | Li Lu Wang Ming |
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| Affiliation: | School of Physical Science and Technology;Nanjing Normal University;Nanjing 210097;China |
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| Abstract: | This paper introduces a testing system for optical fiber connector end surface based on microscopic interferometry.The interferometer consists of a Mirau interference objective and a tube lens.A CCD camera captures the interferograms to get the phase distribution.The carre algorithm is adopted to extract algorithm,so the determinate step size of phase-stepping method is unnecessary.This method can obtain geometrical parameters of the optical fiber connector end surface such as surface topography,radius of c... |
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| Keywords: | optical fiber connector microscopic interferometry mirau interference objective phase-shifting interference phase extracting |
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