| 金属掺杂类金刚石膜的研究进展 |
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| 引用本文： | 郭延龙,孙有文,王淑云,王小兵,程勇,卢常勇. 金属掺杂类金刚石膜的研究进展[J]. 纳米科技, 2008, 5(6): 13-16 |
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| 作者姓名： | 郭延龙 孙有文 王淑云 王小兵 程勇 卢常勇 |
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| 作者单位： | [1]武汉军械士官学校光电技术研究所,湖北武汉430075 [2]安徽光机所,安徽合肥230031 |
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| 摘 要： | 金属掺杂类金刚石（Diamond—like Carbon，DLC）膜可以优化纯类金刚石膜的很多性能。金属掺杂DLC膜不仅在缓解薄膜应力方面具有良好的效果，而且还能改变薄膜的力学和摩擦磨损性能。目前，掺杂DLC膜正以单一掺杂向复合掺杂、均匀掺杂向梯度掺杂发展。文章对掺杂DLC膜的研究进展作了概括及分析。
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| 关 键 词： | 类金刚石膜 掺杂类金刚石膜 金属掺杂 |
Research Progress of Metal Doped Diamond-like Carbon Films |
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| Affiliation: | GUO Yan-long, SUN You-wen, WANG Shu-yun, WANG Xiao-bing, CHENG Yong, LU Chang-yong(1.Opto-Electronics Facility of Wuhan Ordnance Non-Commissioned Officers Academy, Wuhan 430075, China; 2.Anhui Institute of Optics and Fine Mechanics, Hefei 230031, China) |
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| Abstract: | Compared to pure Diamond-like Carbon（DLC） films, metal doped DLC films have better performance and a lot of merits. For example, metal doped DLC films have low inner stress, good adhesion and fine wear resistance. Metal doped DLC Films is developing from single element doping to multiple element doping and from uniform doping to graded doping. The development of metal doped DLC Films is summarized and analyzed, and its wide application prospect is revealed. |
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| Keywords: | metal doped diamond-like caron films protective films |
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