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硬质CrN_x薄膜的高温氧化研究
引用本文:周磊,赵广彬,孙爱祥,张馨元. 硬质CrN_x薄膜的高温氧化研究[J]. 四川工业学院学报, 2010, 0(6): 73-75
作者姓名:周磊  赵广彬  孙爱祥  张馨元
作者单位:西华大学材料科学与工程学院,四川成都610039
基金项目:国家科技重大专项支持项目(2009ZX04012-23); 四川省特种材料及制备技术重点实验室经费资助
摘    要:利用热阴极离子镀膜技术在硬质合金上制备CrNx薄膜。在400℃-800℃区间选取7个温度对试样进行氧化处理后,通过X射线衍射仪(XRD)、扫描电镜(SEM)、自动划痕仪、精密电子天平进行成分、结构及性能分析,研究其氧化过程和性能。结果表明:在700℃以下,CrNx薄膜具有良好的抗高温氧化性。

关 键 词:热阴极离子镀  CrNx  薄膜  抗高温氧化性

Research on Oxidation of CrN_x Hard Films at High Temperature
ZHOU Lei,ZHAO Guang-bin,SUN Ai-xiang,ZHANG Xin-yuan. Research on Oxidation of CrN_x Hard Films at High Temperature[J]. Journal of Sichuan University of Science and Technology, 2010, 0(6): 73-75
Authors:ZHOU Lei  ZHAO Guang-bin  SUN Ai-xiang  ZHANG Xin-yuan
Affiliation:(School of Materials Science and Engineering,Xihua University,Chengdu 610039 China)
Abstract:CrNx hard films could be prepared by hot cathode ion plating technology.After seven samples were oxidized under seven different temperatures from 400℃ to 800℃,the microstructure,composition and mechanics performance of the CrNx films were examined by XRD,SEM,scratch test and electronic precision balance for studying the oxidation processes and properties.The result showed that CrNx films played a good role for oxidation resistance at high temperature below 700℃.
Keywords:hot cathode ion plating  CrNx  hard films  oxidation resistance at high temperature
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