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In_2O_3基甲醛传感器的研制
引用本文:刘如征,全宝富,刘凤敏,陈丽华,刘敏.In_2O_3基甲醛传感器的研制[J].电子元件与材料,2006,25(11):15-17.
作者姓名:刘如征  全宝富  刘凤敏  陈丽华  刘敏
作者单位:吉林大学电子科学与工程学院,吉林,长春,130023
摘    要:以sol-gel法制备的In2O3纳米材料为基体,采用La2O3作为掺杂剂,研制出甲醛传感器。结果表明:La2O3的掺杂可以明显提高元件对甲醛的灵敏度,在工作温度为145℃,(甲醛)为10×10–6时,元件表现出4倍的灵敏度,通过4A分子筛的修饰提高了元件的选择性。在为期90d的追踪实验中发现元件的灵敏度变化小于10%,元件在(甲醛)为50×10–6时,响应、恢复时间分别为8s和30s。

关 键 词:电子技术  甲醛传感器  In_2O_3  sol-gel  灵敏度
文章编号:1001-2028(2006)11-0015-03
收稿时间:2006-05-27
修稿时间:2006-05-27

Reseach on In2O3-based Formaldehyde Sensor
LIU Ru-zheng,QUAN Bao-fu,LIU Feng-min,CHEN Li-hua,LIU Min.Reseach on In2O3-based Formaldehyde Sensor[J].Electronic Components & Materials,2006,25(11):15-17.
Authors:LIU Ru-zheng  QUAN Bao-fu  LIU Feng-min  CHEN Li-hua  LIU Min
Abstract:This formaldehyde sensor was based on the In2O3 nano-powder prepared by sol-gel as the basic material mixed mainly with La2O3. The results show that the sensitivity of the element to the formaldehyde was improved obviously by doping of La2O3. When working temperature is about 145 ℃, and formaldehyde concentration is 10×10–6 (volume fraction), the sensitivity of the element is 4 times. With the modification of 4A molecule-sifter layer, the selectivity of the element is improved. The change of the sensitivity of the element is found to be within 10 % in the 90 days. And the response and recovery time of the element to 50×10–6 formaldehyde gas is 8 s and 30 s, respectively.
Keywords:In2O3  sol-gel
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