| MEMS技术制作的螺线管微电感 |
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| 引用本文： | 方东明,周勇,赵小林,王西宁. MEMS技术制作的螺线管微电感[J]. 微细加工技术, 2006, 0(5): 36-40 |
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| 作者姓名： | 方东明 周勇 赵小林 王西宁 |
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| 作者单位： | 上海交通大学,微纳科学技术研究院,微米/纳米加工技术国家级重点实验室,薄膜与微细技术教育部重点实验室,上海,200030 |
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| 基金项目： | 教育部科学技术研究重点项目;上海市应用材料研究与发展项目 |
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| 摘 要： | 考虑和分析了螺线管微电感的几何结构参数对微电感性能的影响,利用MEMS技术制作了四种不同几何结构的高性能射频螺线管微电感。这些微电感采用铜线圈,以减小线圈寄生电阻,且制作工艺简单,成本低,与IC相兼容。测试结果表明,微电感在较宽的工作频率范围内具有较高的Q值,在频率分别为6 GHz,4.4 GHz,5.8 GHz和5.6 GHz,微电感Q峰值为38,19.1,24.1和21.9,所对应的电感量为1.81 nH,1.07 nH,1.03 nH和1.17 nH。
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| 关 键 词： | 螺线管电感 微机电系统 品质因素 射频 |
| 文章编号： | 1003-8213(2006)05-0036-05 |
| 修稿时间： | 2006-03-28 |
Solenoid Microinductors Fabricated by MEMS Technology |
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| FANG Dong-ming,ZHOU Yong,ZHAO Xiao-lin,WANG Xi-ning. Solenoid Microinductors Fabricated by MEMS Technology[J]. Microfabrication Technology, 2006, 0(5): 36-40 |
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| Authors: | FANG Dong-ming ZHOU Yong ZHAO Xiao-lin WANG Xi-ning |
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| Abstract: | Effects of the geometrical parameters on the performance of solenoid inductor were analyzed and the high-performance RF solenoid microinductors with four different geometrical parameters were fabricated using microelectromechanical systems(MEMS)technology.In these inductors,the electroplated copper coils are employed to reduce the series resistance.The fabrication process is simple,low cost and compatible with IC technology.The measurement results show that these inductors have high Q-factor in the wide range of operating frequency.The peakQ of these inductors are 38,19.1,24.1 and 21.9(6 GHz,4.4 GHz,5.8 Ghz,5.6 GHz)and the corresponding inductance are 1.81 nH,1.07 nH,1.03 nH and 1.17 nH at each peak-Q frequency,respectively. |
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| Keywords: | solenoid inductor MEMS quality factor RF |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
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