| 微机械面型微加热器的热学分析 |
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| 引用本文： | 吴雷,李铁,王立春,王翊,王跃林.微机械面型微加热器的热学分析[J].功能材料与器件学报,2005,11(4):466-470,475. |
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| 作者姓名： | 吴雷 李铁 王立春 王翊 王跃林 |
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| 作者单位： | 中国科学院上海微系统与信息技术研究所,传感技术联合国家重点实验室,上海,200050;中国科学院上海微系统与信息技术研究所,传感技术联合国家重点实验室,上海,200050;中国科学院上海微系统与信息技术研究所,传感技术联合国家重点实验室,上海,200050;中国科学院上海微系统与信息技术研究所,传感技术联合国家重点实验室,上海,200050;中国科学院上海微系统与信息技术研究所,传感技术联合国家重点实验室,上海,200050 |
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| 摘 要： | 针对微机械面型微加热器，采用解析方法对加热器在真空和大气下的温度分布，以及均热器对加热器温度分布的影响进行了深入分析。分析结果表明，真空下环形加热电阻可以达到较好的大面积均温效果，而大气下的加热电阻应尽可能小同时尽可能分布在整个加热区内，分析的结果经ANSYS有限元模拟和样品制作测试，与实际情况吻合较好。
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| 关 键 词： | 微电子机械系统 面型微加热器 热分析 |
| 文章编号： | 1007-4252（2005）04-0466-05 |
| 收稿时间： | 2005-02-21 |
| 修稿时间： | 2005-02-212005-04-08 |
Thermal analysis of MEMS micro-hotplate with uniform temperature in large area |
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| WU Lei,LI Tie,WANG Li-chun,WANG Yi,WANG Yue-lin.Thermal analysis of MEMS micro-hotplate with uniform temperature in large area[J].Journal of Functional Materials and Devices,2005,11(4):466-470,475. |
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| Authors: | WU Lei LI Tie WANG Li-chun WANG Yi WANG Yue-lin |
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| Affiliation: | State Key Laboratories of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China |
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| Abstract: | Thermal performance of MEMS based micro-hotplate was investigated by a simplified model both in vacuum and in atmosphere.The influence of a homogeneous block inside the heater was also studied.The results demonstrate that for a ring-shaped heater with a homogeneous block in vacuum,a good uniformity of the temperature can be obtained and in atmosphere the ring heater should be narrow and extend to the inner part for better uniformity.The results obtained by coupled thermal-electrical simulation using the finite element method(ANSYS) software results are in good agreement with the measured results.Furthermore,an optimized heater giving a uniform temperature all over the active area is suggested. |
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| Keywords: | MEMS micro - hotplate thermal analysis |
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