表面三维形貌测量及其评定的研究

对表面三维形貌测量技术展开了较为全面的研究，测量过程由相移，采样，相位提取及数据处理等部分组成．整个测量系统采用激光为干涉光源，CCD为图像传感器，压电陶瓷提供微小位移，通过图像采集卡将干涉条纹采集到计算机内存．文中采用上述理论对标准样块进行了测量，计算机得到表面三维形貌图，根据建立的基准面分离出粗糙度信息，并由给出的参数评定数学模型，编制出合理的软件，计算出零件表面的三维参数．最后给出实验结果和分析，并提出下一步研究工作的设想．

Measurement and Assessment Evaluation of the Three-dimensional Surface Topography

In this thesis,the author comprehensively composed all-round research on the technology of surface topography measurement.The measure process includes phase-shifting,sample taking,extracting of phase,data handling.The entire measurement system used the laser as the light resource,CCD as the sensor and PZT to provide microscopic translating,the computer sampled image and processed data with high speed.Adopted the theory,the 3-D surface topography of standard specimen was carried out.Then we separated the inf...