MEMS microswitches for reconfigurable microwave circuitry

The performance is reported for a new microelectromechanical structure (MEMS) cantilever microswitch. We report on both dc- and capacitively-contacted microswitches. The dc-contacted microswitches have contact resistance of less than 1 Ω, and the RF loss of the switch up to 40 GHz in the closed position is 0.1-0.2 dB. Capacitively-contacted switches have an impedance ratio of 141:1 from the open to closed state and in the closed position have a series capacitance of 1.2 pF. The capacitively-contacted switches have been measured up to 40 GHz with S₂₂ less than -0.7 dB across the 5-40 GHz band