| 基片与膜厚对硬质薄膜力学性能的影响 |
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| 引用本文： | 戴嘉维,张惠娟,李戈扬.基片与膜厚对硬质薄膜力学性能的影响[J].真空科学与技术学报,2003,23(3):147-151. |
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| 作者姓名： | 戴嘉维 张惠娟 李戈扬 |
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| 作者单位： | 1. 上海交通大学高温材料与高温测试教育部重点实验室,上海,200030
2. 上海交通大学金属基复合材料国家重点实验室,上海,200030 |
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| 摘 要： | 采用毫牛力学探针技术的两步压入试验法研究了高速钢和不锈钢基片上不同厚度TiN薄膜的硬度和弹性模量。结果表明 :采用同样工艺制备的TiN薄膜 ,其力学性能随基片类型和膜厚的不同有明显变化。薄膜的硬度和弹性模量随膜厚的增加而提高 ;基体硬度的提高也使薄膜呈现较高的硬度和模量。分析认为薄膜内应力状态的改变是产生这些现象的主要原因。
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| 关 键 词： | 两步压入法 薄膜 基片 硬度 弹性模量 |
| 文章编号： | 0253-9748(2003)03-0147-05 |
| 修稿时间： | 2002年10月20 |
Influence of Substrates and Film Thickness on Mechanical Properties of Hard Films |
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| Dai Jiawei ,Zhang Huijuan ,Li Geyang.Influence of Substrates and Film Thickness on Mechanical Properties of Hard Films[J].JOurnal of Vacuum Science and Technology,2003,23(3):147-151. |
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| Authors: | Dai Jiawei Zhang Huijuan Li Geyang |
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| Affiliation: | Dai Jiawei 1,Zhang Huijuan 1,Li Geyang 2* |
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| Abstract: | A two step penetration method using the microindentation technique was employed to study the hardness and elastic modulus of TiN thin films deposited with different film thickness on high speed steel and stainless steel substrates.The results show that TiN thin films grown under the same deposition conditions exhibit different mechanical properties corresponding to the variations of the substrates and film thickness.As the film thickness or the substrate hardness increases,the film hardness and elastic modulus are also enhanced.Interior stresses are considered to be the main reason for these relations. |
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| Keywords: | Two step penetration method Thin films Substrates Hardness Elastic modulus |
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