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单壁碳纳米管阵列场效应特性的研究
引用本文:郑富中,唐一科,周兆英,杨兴,吴英. 单壁碳纳米管阵列场效应特性的研究[J]. 固体电子学研究与进展, 2010, 30(4)
作者姓名:郑富中  唐一科  周兆英  杨兴  吴英
基金项目:国家自然科学基金资助项目
摘    要:单壁碳纳米管(Single-walled carbon nanotube,SWCNT)有许多异常的电特性,要完全实现其在实际电子系统中的潜在应用价值,需要在器件与电路的结合上有不断创新的方法。由于SWCNT在电子学上分为金属型和半导体型两大类,其中每一大类根据手性的不同在电特性上又各有差异,再加上要合成或合成后分离出单一手性的SWCNT,目前的技术还存在相当大的难度。结合化学气相沉积中的控制生长、控制转移排列整齐有序的SWC-NT阵列与微加工工艺等方法,将SWCNT阵列作为一个器件单元来进行测试,测试结果显示了一定的场效应特性。

关 键 词:单壁碳纳米管阵列  化学气相沉积  控制转移  场效应

Field-effect Investigation on Single-walled Carbon Nanotube Array
ZHENG Fuzhong,TANG Yike,ZHOU Zhaoying,YANG Xing,WU Ying. Field-effect Investigation on Single-walled Carbon Nanotube Array[J]. Research & Progress of Solid State Electronics, 2010, 30(4)
Authors:ZHENG Fuzhong  TANG Yike  ZHOU Zhaoying  YANG Xing  WU Ying
Abstract:Single-walled carbon nanotubes(SWCNT) have many exceptional electronic properties.Realizing the full potential of SWCNT in realistic electronic systems requires a scalable approach to device and circuit integration.Because SWCNT can be classified as metallic and semiconducting in electronics;the two main sorts have different electrical characteristics depending on chirality;in addition,the difficulties of either selective synthesis or post-synthesis separation are seen as the primary roadblock in technologies.The methods of controlling growth in chemical vapour deposition,controlling transfer upon well-aligned SWCNT array,and micro fabrication art are combined to measure a field-effect device based on SWCNT array.The measured results show a certain degree of field-effect characteristics.
Keywords:SWCNT array  chemical vapour deposition(CVD)  controlling transfer  field effect
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