| 复合光路光学镀膜宽光谱膜厚监控系统 |
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| 引用本文： | 任豪,王巧彬,罗宇强,李康业. 复合光路光学镀膜宽光谱膜厚监控系统[J]. 激光与光电子学进展, 2010, 0(5) |
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| 作者姓名： | 任豪 王巧彬 罗宇强 李康业 |
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| 作者单位： | 广州市光机电技术研究院研发检测中心; |
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| 基金项目： | 广东省地市重点引导计划项目(2004B16001084)资助课题 |
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| 摘 要： | 介绍一种复合光路宽光谱膜厚监控系统及其软硬件开发,对系统结构组成和工作原理进行说明。通过增加中间通光孔式的分光镜的复合光路,基于LabVIEW平台开发宽光谱膜厚监控软件,实现了基于宽光谱扫描法的宽光谱膜厚监控和基于极值法的光学膜厚监控的兼容并用,提高了光学镀膜膜厚监控的精确性和自动化,为传统光学镀膜设备的升级改造提出了一种可行性技术。
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| 关 键 词： | 膜厚监控 光学镀膜 复合光路 宽光谱 |
Wide-Band Spectrum Optical Film Thickness Monitoring System with Compound Light Path |
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| Ren Hao Wang Qiaobin Luo Yuqiang Li Kangye. Wide-Band Spectrum Optical Film Thickness Monitoring System with Compound Light Path[J]. Laser & Optoelectronics Progress, 2010, 0(5) |
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| Authors: | Ren Hao Wang Qiaobin Luo Yuqiang Li Kangye |
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| Affiliation: | Research and Testing Center;Guangzhou Research Institute of Optics-Mechanics-Electricity Technology;Guangzhou;Guangdong 510663;China |
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| Abstract: | A wide-band spectrum optical film thickness monitoring system with compound light path is introduced. The structure, components and working principles of the system are analyzed. The monitoring system is developed by increasing a piece of spectroscope with aperture to form compound light path, and wide-band spectrum monitoring software based on LabVIEW. Methods of wide-band spectrum optical film thickness monitoring based spectrum scanning method and optical film thickness monitoring based on extremum metho... |
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| Keywords: | film thickness monitoring optical coating compound light path wide-band spectrum |
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