| 集成电路与超纯水 |
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| 引用本文： | 沈健.集成电路与超纯水[J].洁净与空调技术,2002(1):22-26. |
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| 作者姓名： | 沈健 |
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| 作者单位： | 中国电子工程设计院 |
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| 摘 要： | 本文以16M位、64M位集成电路工厂纯水为实例，介绍了两套超纯水装置的处理流程与制水特点，它们均已通过一年多运转的考验，处理效果稳定，水质指标分别达到了设计水质要求。
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| 关 键 词： | 集成电路 超纯水 工程实例 水质 |
IC and ultrapure water |
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| Shen Jian.IC and ultrapure water[J].Contamination Control & Air-Conditioning Technology,2002(1):22-26. |
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| Authors: | Shen Jian |
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| Abstract: | Take the example of pure water in IC fab of 16 Mb and 64 Mb to explain the process flow and its features of two sets of ultrapure water installations. All had been in operation stably for over one year. The pure water quality had met the designing requirements. |
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| Keywords: | IC Ultrapure water Engineering example |
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