| 基于压电陶瓷的MEMS测试用的多载荷加载台的研制 |
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| 引用本文： | 施阳和,张鸿海,汪学方.基于压电陶瓷的MEMS测试用的多载荷加载台的研制[J].中国陶瓷,2007,43(8):34-35,13. |
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| 作者姓名： | 施阳和 张鸿海 汪学方 |
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| 作者单位： | 1. 华中科技大学,武汉,430074;华东交通大学,南昌,330013
2. 华中科技大学,武汉,430074 |
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| 基金项目： | 国家高技术研究发展计划(863计划) |
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| 摘 要： | MEMS模态测试的一个突出的特点在于非接触性,无论是振动激励还是响应测量,都只能是非接触的。为解决MEMS测试中非接触式的振动激励问题,对基础激励的原理进行了研究,并设计开发出基于压电陶瓷的MEMS测试用的多载荷加载台。这是一个能为MEMS测试提供振动、温度和压力这三种载荷的加载装置。从而为进一步开展MEMS的动态测试工作奠定了基础。
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| 关 键 词： | 微机电系统 压电陶瓷测试 多载荷加载台 设计原理 |
| 文章编号： | 1001-9642（2007）08-0034-02 |
| 修稿时间： | 2007-03-30 |
PREPARATION OF MULTI-LOADING DEVICE FOR MEMS TESTING BASED ON PZT |
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| Shi Yanghe,Zhang Honghai,Wang Xuefang.PREPARATION OF MULTI-LOADING DEVICE FOR MEMS TESTING BASED ON PZT[J].China Ceramics,2007,43(8):34-35,13. |
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| Authors: | Shi Yanghe Zhang Honghai Wang Xuefang |
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| Affiliation: | 1 Huazhong university of science and technology, Wuhan 430074; 2 East China Jiaotong University, Nanchang 330013 |
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| Abstract: | A salient feature of modal testing of MEMS is non-contact. Excitation and response measurement must be non-contact. In order to solve problem of vibrating excitation of MEMS testing, principle of base-excitation was researched. Multi-loading device for MEMS testing based on PZT(piezoelectric ceramic) which can provide vibrating and temperature and pressure load for MEMS testing has been designed. Dynamic testing of MEMS will be benefited from the device |
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| Keywords: | MEMS PZT testing Multi-loading device design principle |
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