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高反射性电流阻挡层用于提高InGaN/GaN发光二极管的光输出功率
引用本文:张晓洁,杨瑞霞,王静辉.高反射性电流阻挡层用于提高InGaN/GaN发光二极管的光输出功率[J].半导体学报,2012,33(7):074008-4.
作者姓名:张晓洁  杨瑞霞  王静辉
作者单位:河北工业大学信息工程学院,河北工业大学信息工程学院
摘    要:由SiO2/TiO2分布布拉格反射镜(DBR)和Al镜组成的混合式反射电流阻挡层用于提高InGaN/GaN发光二极管的光输出功率。混合式反射电流阻挡层不仅增强了电流扩展效应而且有效的将射向p金属电极的光子反射防止其对p电极焊点附近光子的吸收。实验结果表明,淀积在p-GaN上1.5个周期的SiO2/TiO2DBR和Al镜在455nm垂直入射时的反射率高达97.8%。在20mA的工作电流下,与没有电流阻挡层的发光二极管相比,生长1.5对SiO2/TiO2 DBR和Al镜作为电流阻挡层的发光二极管的光输出功率提高了12.5%,且光输出功率的分布更加均匀。

关 键 词:InGaN  光输出功率  发光二极管  反射电流  阻挡层  反射性  分布布拉格反射镜  混合动力车

Enhanced light output power in InGaN/GaN light-emitting diodes with a high reflective current blocking layer
Zhang Xiaojie,Yang Ruixia and Wang Jinghui.Enhanced light output power in InGaN/GaN light-emitting diodes with a high reflective current blocking layer[J].Chinese Journal of Semiconductors,2012,33(7):074008-4.
Authors:Zhang Xiaojie  Yang Ruixia and Wang Jinghui
Affiliation:College of Information Engineering, Hebei University of Technology,College of Information Engineering, Hebei University of Technology
Abstract:The light output power of InGaN/GaN light-emitting diode (LED) is improved by using a SiO2/TiO2 distributed Bragg reflector (DBR) and an Al mirror as a hybrid reflective current blocking layer (CBL). Such a hybrid reflective CBL not only plays the role of the CBL which enhances current spreading but also plays the role of a reflector which prevents photons near the p-electrode pad from being absorbed by metal electrode. At the wavelength of 455nm, 1.5-pair of SiO2/TiO2 DBR and Al mirror (i.e. 1.5-pair DBR Al) deposited on the p-GaN layer showed a normal-incidence reflectivity as high as 97.8%. With 20 mA current injection, it was found that the output power was 25.26, 24.45, 23.58 and 22.45 mW for the LED with 1.5-pair DBR Al CBL, 3-pair DBR CBL, SiO2 CBL and without CBL, respectively.
Keywords:distributed Bragg reflector (DBR)  Al  current blocking layer (CBL)  light-emitting diode (LED)
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