| 仿壁虎微纳米粘附阵列的工艺制作 |
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| 引用本文： | 陈士荣,梅涛,倪林,单建华,王辉静.仿壁虎微纳米粘附阵列的工艺制作[J].微纳电子技术,2006,43(9):434-437. |
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| 作者姓名： | 陈士荣 梅涛 倪林 单建华 王辉静 |
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| 作者单位： | 中国科学院,智能机械研究所,仿生感知与控制研究中心,合肥,230031 |
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| 基金项目： | 国家自然科学基金;国家重点基础研究发展计划(973计划) |
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| 摘 要： | 介绍了采用微纳米加工技术制作仿壁虎脚趾粘附阵列的工艺方法。用ICP设备制作具有微米孔阵列的硅模板,用聚合物浇注,脱模后得到直径分别为2μm和5μm的微米阵列;浇注具有纳米孔径的氧化铝模板,脱模后得到直径约100nm的柔性纳米阵列。
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| 关 键 词： | 范德瓦尔斯力 微纳米加工技术 粘附阵列 |
| 文章编号： | 1671-4776(2006)09-0434-04 |
| 收稿时间： | 2006-03-27 |
| 修稿时间： | 2006年3月27日 |
Fabrication of Synthetic Gecko Foot-Hair Micro/Nano-Structures |
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| CHEN Shi-rong,MEI Tao,NI Lin,SHAN Jian-hua,WANG Hui-jing.Fabrication of Synthetic Gecko Foot-Hair Micro/Nano-Structures[J].Micronanoelectronic Technology,2006,43(9):434-437. |
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| Authors: | CHEN Shi-rong MEI Tao NI Lin SHAN Jian-hua WANG Hui-jing |
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| Affiliation: | Center of Biomimetic Sensing and Control Research, Institute of Intelligent Machines Chinese Academy of Sciences, Hefei 230031, China |
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| Abstract: | A micro/nano-manufacturing method for synthetic gecko foot-hairs was proposed.ICP technology was used to fabricate silicon templates filled with micropores,the templates were molded with liquid polymer,after peeling off the polymer from the template,2 μm and 5 μm foot-hairs were obtained.Alumina membranes with self-organized high aspect ratio pores were used as the master templates and molded with liquid polymer,after peeling off the polymer from the template,a 100 nm diameter polymer array was obtained. |
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| Keywords: | Van der Waals forces micro/nano-structure processing adhesion array |
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