Growth of graphite film over the tops of vertical carbon nanotubes using Ni/Ti/Si substrate |
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Authors: | Chia-chih Chuang Wei-long Liu Wen-jauh Chen Jin-hua Huang |
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Affiliation: | 1. Photovoltaics Technology Center,Industrial Technology Research Institute,Hsinchu,China Taibei 2. Department of Materials Science and Engineering,Formosa University,Yunliu,China Taibei 3. Graduate School of Materials Science,Yunlin University of Science and Technology,Yunlin,China Taibei |
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Abstract: | A substrate with Ni/Ti/Si structure was used to grow vertical carbon nanotubes (CNTs) with a graphite film over CNT tops by thermal chemical vapor deposition with CH4 gas as carbon source.The carbon nanotubes and the substrate were character-ized by a field emission scanning electron microscope for the morphologies,a transmission electron microscope for the microstruc-tures,a Raman spectrograph for the crystallinity,and an Auger electron spectrometer for the depth distribution of elements.The re-sult shows that when the thickness ratio of Ni layer to Ti layer in substrate is about i,a graphite film with relatively good quality canbe formed on the CNT tops. |
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Keywords: | carbon nanotubes (CNTs) graphite film CH4 gas thermal chemical vapor deposition (TCVD) |
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