| 扫描电子显微镜放大倍数校准方法研究 |
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| 引用本文： | 徐小芳,李小冲. 扫描电子显微镜放大倍数校准方法研究[J]. 仪器仪表用户, 2021, 0(3): 19-21,105 |
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| 作者姓名： | 徐小芳 李小冲 |
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| 作者单位： | 清华大学深圳国际研究生院 |
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| 摘 要： | 随着科技的发展进步,扫描电子显微镜现有检定规程提出的部分校准方法已不适用.本文对扫描电子显微镜放大倍数示值误差的校准提出了新的方法和计算过程,利用像素坐标表征标记线长度,以减少图像输出及测长仪使用过程中引入的误差.
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| 关 键 词： | 扫描电子显微镜 放大倍数 校准方法 像素 |
Magnification Calibration Method of Scanning Electron Microscope |
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| Xu Xiaofang,Li Xiaochong. Magnification Calibration Method of Scanning Electron Microscope[J]. Electronic Instrumentation Customer, 2021, 0(3): 19-21,105 |
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| Authors: | Xu Xiaofang Li Xiaochong |
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| Affiliation: | (Tsinghua Shenzhen International Graduate School,Guangdong,Shenzhen,518055,China) |
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| Abstract: | With the development of science and technology,part of the calibration methods in the verification regulation of scanning electron microscope does not applicable.In this paper,a new method and calculation process for the magnification calibration error are proposed.Some Proposals are put forward to revision of the metrological technical specification of scanning electron microscope.The pixel coordinates are used to characterize the length of the marker line.Reduced the error introduced in the process of length measuring and image output. |
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| Keywords: | scanning electron microscope magnification calibration method pixel |
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