Micron-scale polymer-metal cantilever actuators fabricated by focused ion beam |
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Authors: | C.C. LeeAuthor VitaeG. AliciAuthor Vitae G.M. SpinksAuthor VitaeG. ProustAuthor Vitae J.M. CairneyAuthor Vitae |
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Affiliation: | a Australian Centre for Microscopy & Microanalysis, University of Sydney, Australia b School of Mechanical, Materials & Mechatronic Engineering, University of Wollongong, Australia c School of Civil Engineering, University of Sydney, Australia |
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Abstract: | Polymer-metal microcantilever actuators have been fabricated using an innovative approach based on focused ion beam micromachining technology. The fabrication involves depositing a thin metal film onto the surface of the polymer and machining using the ion beam. The microcantilever created is then extracted and transferred to a desirable support using a micromanipulator. This approach demonstrates the potential for maskless and resistless prototyping of cantilevers that can be evaluated for use as MEMS/NEMS actuators. Nanometer-scale displacement of the resulting polystyrene-platinum bimorph microactuator with respect to temperature change is demonstrated via visual monitoring in a scanning electron microscope with a heating stage. The performance of the bimorph cantilever microactuators is verified using both analytical and finite element modeling. |
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Keywords: | Polystyrene-platinum microcantilever Focused ion beam Thermal microactuator Analytical model Finite element model |
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