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Magnesium interlayered diamond coating on silicon
Authors:MA Dar  SG Ansari  ZA Ansari  Hironobu Umemoto  Young-Soon Kim  Hyung-Kee Seo  Gil-Sung Kim  Eun-Kyung Suh  Hyung-Shik Shin  
Affiliation:

aThin Film Technology Laboratory, School of Chemical Engineering, Chonbuk National University, Chonju 561-756, South Korea

bSchool of Materials Science, Japan Advanced Institute of Science and Technology, 1-1 Asahidai, Nomi, Ishikawa 923-1292, Japan

cDepartment of Semiconductor Science and Technology, Chonbuk National University, Chonju 561-756, South Korea

Abstract:Diamond thin films have been deposited using hot filament chemical vapour deposition technique on manually scratched p-Si(1 0 0) substrate, with and without magnesium interlayer. In spite of magnesium melting point being lower (Tm = 649 °C) than the growth temperature of the substrate (Ts not, vert, similar 750 °C) used in these experiments, it was found that high quality diamond films could be grown on Mg covered substrate. A liquid substrate is probably generated during the diamond film growth. Raman spectroscopy analysis exhibited only the triply degenerate, zone centre optical phonon peak at 1333 cm?1 indicating that nearly stress free crystallites were present. Broadening of the Raman peak (not, vert, similar11.76 cm?1) indicates that some small crystallites also are present. Scanning electron and atomic force microscopy accompanied by X-ray diffraction analysis where used to compare the details of diamond film growth directly on scratched Si(1 0 0) and Mg interlayered scratched Si(1 0 0) substrates.
Keywords:HFCVD  Diamond film  Buffer layer  Bias growth
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