1.Centre for Energy Research, Konkoly-Thege Miklós út 29-33, 1121, Budapest, Hungary ;2.National Research Nuclear University MEPhI (Moscow Engineering Physics Institute), Kashirskoe Highway 31, Moscow, 115409, Russian Federation ;
Abstract:
Microsystem Technologies - Due to their complex electro-thermal characteristics microhotplates used in environmental gas sensors require careful design to exhibit uniform temperature and low power...