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Optical and structural properties of aluminium nitride thin-films synthesized by DC-magnetron sputtering technique at different sputtering pressures |
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| Authors: | Ababneh A Dagamseh A M K Albataineh Z Tantawi M Al-Bataineh Q M Telfah M Zengerle T Seidel H |
| Affiliation: | 1.Electronics Engineering Department, Hijjawi Faculty for Engineering Tech., Yarmouk University, Irbid, Jordan ;2.Chair of Micromechanics, Microfluidics/Microactuators, Faculty of Natural Sciences and Technology, Saarland University, Saarbrücken, Germany ;3.Department of Physical Sciences, Jordan University of Science and Technology, Ar-Ramtha, Jordan ; |
| Abstract: | Microsystem Technologies - Aluminium nitride thin-films (AlN) were fabricated by a DC-magnetron sputtering technique at different background pressures while maintaining the same deposition... |
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