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Optimizing nonlinearity of piezoresistive pressure sensors by an asymmetric Wheatstone bridge |
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| Authors: | Li Ting Shang Haiping Zhang Qunying Wang Weibing |
| Affiliation: | 1.Institute of Microelectronics of Chinese Academy of Sciences, Beijing, China ;2.University of Chinese Academy of Sciences, Beijing, China ; |
| Abstract: | Microsystem Technologies - Since nonlinearity is critical to silicon piezoresistive pressure sensors, this paper combined theoretical analysis and simulation to study the effect of changing the... |
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