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Characterization of the Ion Beam Current Density of the RF Ion Source with Flat and Convex Extraction Systems |
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| Authors: | Salehi Maryam Zavarian Ali Asghar Arman Ali Hafezi Fatemeh Rad Ghasem Amraee Mardani Mohsen Hamze Kooros Luna Carlos Naderi Sirvan Ahmadpourian Azin |
| Affiliation: | 1.Vacuum Technology Research Group, ACECR, Sharif University Branch, Tehran, Iran ;2.Universidad Autónoma de Nuevo León, Av. Universidad S/N, San Nicolás de los Garza, 66455, Nuevo León, Mexico ;3.Young Researchers and Elite Club, Kermanshah Branch, Islamic Azad University, Kermanshah, Iran ;4.Young Researchers and Elite Club, Arak Branch, Islamic Azad University, Arak, Iran ; |
| Abstract: | Silicon - The characterization of ion beam current density distribution and beam uniformity is crucial for improving broad-beam ion source technologies. The design of the broad ion beam extraction... |
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