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Stress analysis in new improved differential vertical comb capacitive micro accelerometer using SOI technology |
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| Authors: | Dounkal Manoj Kumar Bhan R K Kumar Navin |
| Affiliation: | 1.Solid State Physics Laboratory, Lucknow Road, Timarpur, Delhi, 110054, India ;2.Institute of Defence Scientists and Technologists, Mazumdar Marg, Timarpur, Delhi, 110054, India ;3.Indian Institute of Technology, Ropar, Ropar, 140001, India ; |
| Abstract: | Microsystem Technologies - Recently a new improved differential vertical comb type capacitive accelerometer using silicon on insulator (SOI) technology reported having better performance than... |
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