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Modelling of air damping effect on the performance of encapsulated MEMS resonators |
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| Authors: | Wang Ankang Sahandabadi Sahereh Harrison Tyler Spicer Dean Ahamed Mohammed Jalal |
| Affiliation: | 1.Mechanical Automotive and Materials Engineering, University of Windsor, Windsor, ON, Canada ;2.Teledyne Micralyne, Edmonton, AB, Canada ; |
| Abstract: | Microsystem Technologies - The dynamic performance of a micro-resonator depends on its energy loss mechanism which is quantified by Q-factor (Quality factor). This paper presents numerical... |
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