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Magnetically coupled oscillators applicable to high-sensitivity mass detection |
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| Authors: | Xia Cao Wang Dong F Ono Takahito Itoh Toshihiro Esashi Masayoshi |
| Affiliation: | 1.Micro Engineering and Micro Systems Laboratory (JML), School of Mechanical and Aerospace Engineering (SMAE), Jilin University, Changchun, 130025, China ;2.Research Center for Ubiquitous MEMS and Micro Engineering, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, 305-8564, Japan ;3.Department of Mechanical Systems and Design, Tohoku University, Sendai, 980-8579, Japan ;4.Department of Precision Engineering, The University of Tokyo, Tokyo, 113-8656, Japan ;5.WPI Advanced Institute for Materials Research, Tohoku University, Sendai, 980-8577, Japan ; |
| Abstract: | Microsystem Technologies - In this paper, a system of magnetically coupled oscillators consisting of a Π-shaped horizontal cantilever and a rectangular vertical cantilever with a frequency... |
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