| 标准静态膨胀法真空装置研制 |
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| 引用本文： | 许红,王金锁,孟宪华.标准静态膨胀法真空装置研制[J].上海计量测试,2003,30(4):9-11. |
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| 作者姓名： | 许红 王金锁 孟宪华 |
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| 作者单位： | 上海市计量测试技术研究院 |
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| 摘 要： | 本装置检定范围(10^-3～10^5)Pa，最佳校准能力0．012％～2．2％．可以检定薄膜真空计。热传导真空计以及电离真空计。该装置的建立不仅满足了从大气到10^-3Pa高真空计量的需求，而且还可以用来校准标准漏孔，拓宽了检测领域。
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| 关 键 词： | 真空计 标准静态膨胀法 校准方法 校准装置 最佳校准能力 校准原理 |
Vacuum Standard Device Using Static Expansion Method |
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| Xu Hong,Waang Jinsuo,Meng Xianhua.Vacuum Standard Device Using Static Expansion Method[J].Shanghai Meassurement and Testing,2003,30(4):9-11. |
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| Authors: | Xu Hong Waang Jinsuo Meng Xianhua |
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| Affiliation: | Shanghai Institute of Measurement and Testing Technology 200233 |
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| Abstract: | The performance of a static expansion vacuum standard is introduced in this paper. Calibration pressure of this apparatus is from 10-3 Pa to 105 Pa. And the total uncertainty caused by random errors is from 0.012% to 2.2%. This standard is used to calibrate capacitance diaphragm gauges, thermal conductivity vacuum gauge and various ion vacuum gauge. The standard also can be used to calibration gaseous reference leaks. |
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| Keywords: | Static Expansion Vacuum Standard Uncertainty Vacuum Gauge |
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