微型应变传感器的设计与制造

把压敏电阻敏感元件、温度补偿电路和高电平放大器,在硅片上采用集成技术制成微型应变传感器,它有电压及频率两种形式的输出。给出了该传感器的设计、制造和测试结果。这种传感器也可以做压力传感器使用,不过在设计几何布局和制造处理上略有不同。

The Design and Manufacture of a Miniature Strain Sensor

A miniature strain sensor is made on silicon diaphragm by iategrating piezoresistor element, temperature conpsnsatins circuits and high level amplifier with IC technique. It has two forms of output, voltage output and frequency output. The design, manufacture and test rusults are given. The sensor can also be used as a pressure sensor with a slight change in geometrical arrangement and manufacturing art.