纳米级电容测微系统的研究

本文首先介绍非接触式高精度电容测微仪的基本工作原理,进而详细论述纳米级电容测微技术中所涉及到的非线性误差、环境噪声等的关键技术问题,对典型驱动电缆方案作比较。根据原理模型,给出仪器的主要结构。对仪器自身产生的各种误差进行详细的分析,并提出相应的消除或修正方法。换用不同有效直径的传感器可以使仪器分辨率最小达到0 1nm ,测量范围±2～±5 0 μm ,满量程非线性度优于0 5 %。该仪器可广泛应用于通过串口、USB口通信的高精度的动、静态微位移测量及纳米定位

A research of the technology of nano-meter capacitive measurement

In this paper the principle of non contact nano meter capacitive measurement instrument is introduced Then the key technology for reducing or eliminating the nonlinear errors and some ambient miose, such as equipotential ring, driving electric cable, are proposed in detailed, and several programs of driving electric cable are compared especially According to the principle model, the modular design on the modularized circuit of the micrometer is given Then detailed analyses on elimination errors created by the capacitance measurement is given, at the same time various amendments or slaking methods are proposed Changing the sensors with different effective diameter can result in the best resolution of 0 1nm, with an measurement range from ±2μm to ±50μm, its linearity is better than 0 5% With the USB or COM communication the instrument can be widely applied in the high-resolution static or dynamic micro displacement-measurement and the nano-positioning