Comparison of graphene films grown on 6H-SiC and 4H-SiC substrates

Abstract

Atomic force microscopy, Kelvin-probe microscopy and Raman spectroscopy have been used to examine graphene films grown by thermal decomposition of the Si face of semi-insulating substrates of 6H-SiC and 4H-SiC polytypes in the atmosphere of argon. It was demonstrated that the quality of graphene grown on substrates of various polytypes at identical technological growth regimes is about the same. A conclusion was made that the differences in crystal structure between 6H-SiC and 4H-SiC does not lead to significant dissimilarities in the mechanism of sublimation of silicon carbide components from the surface of a crystal and in that of graphene crystallization.