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极限电流型氧传感器热力学分析及结构优化
引用本文:谢胜秋,程振乾,任健,葛杨.极限电流型氧传感器热力学分析及结构优化[J].传感器与微系统,2017,36(5).
作者姓名:谢胜秋  程振乾  任健  葛杨
作者单位:1. 中国电子科技集团公司第四十九研究所,黑龙江哈尔滨,150001;2. 哈尔滨工程大学机电学院,黑龙江哈尔滨,150001
摘    要:阐述正面开孔氧传感器的结构机理,并对特定结构的氧传感器进行了电热耦合分析,进而利用特定环境下传感器尺寸的仿真设计规律,对敏感芯体结构进行优化设计,并分析不同结构参数的敏感芯体热性能,优化敏感芯体的工作形状.对比电热耦合数值仿真分析与优化后的氧传感器测试结果,研究分析表明:施加2.2W加热功率即可使氧传感器达到400~500℃的工作温度;特定工况环境下,对传感器封接层和敏感芯体厚度的多目标优化设计结果稳定、方法可靠.

关 键 词:氧传感器  电热耦合  敏感芯体  形状优化  性能测试

Thermo dynamic analysis and structural optimization on limiting current oxygen sensor
XIE Sheng-qiu,CHENG Zhen-qian,REN Jian,GE Yang.Thermo dynamic analysis and structural optimization on limiting current oxygen sensor[J].Transducer and Microsystem Technology,2017,36(5).
Authors:XIE Sheng-qiu  CHENG Zhen-qian  REN Jian  GE Yang
Abstract:Structural mechanism of oxygen sensor with positive hole is expounded,and by electro thermal coupling analysis on oxygen sensor with specific structure is carried out,to optimize the design of sensitive core simulation design rules of sensor sizes,under specific environment,from analysis on thermal performances of sensitive core with different structural parameters,optimize working shape of sensitive core.Compare results of electric thermo coupling numerical simulation analysis on oxygen sensors with optimized test result of oxygen sensor,it shows that applying heating power of 2.2 W can make the oxygen sensor reach to the working temperature of 400 ~ 500 ℃;under specific working condition,multi-target optimal design result of thickness sealing layer and the sensitive core is reliable and stable.
Keywords:oxygen sensor  electro-thermal coupling  sensitive core  shape optimization  performance test
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