| 电容式薄膜真空压力传感器设计 |
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| 引用本文： | 王凡,崔宏敏,宗义仲,王文博.电容式薄膜真空压力传感器设计[J].传感器与微系统,2017,36(3). |
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| 作者姓名： | 王凡 崔宏敏 宗义仲 王文博 |
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| 作者单位： | 中国电子科技集团公司第四十九研究所,黑龙江哈尔滨,150001 |
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| 摘 要： | 为了满足在工程型号上的使用要求,解决真空压力传感器敏感探头壳体与传感器壳体隔离绝缘问题;传感器输出信号非线性的补偿问题;传感器热零点漂移的全电路的温度补偿问题,采用电容式薄膜封装结构,壳体为电容的另一极,在0.1~100 Pa的范围内进行了校准测试,实现了传感器0.2%FS的测量精度.
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| 关 键 词： | 电容式薄膜真空压力传感器 零点漂移 温度补偿 |
Design of capacitive thin film vacuum pressure sensor |
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| WANG Fan,CUI Hong-min,ZONG Yi-zhong,WANG Wen-bo.Design of capacitive thin film vacuum pressure sensor[J].Transducer and Microsystem Technology,2017,36(3). |
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| Authors: | WANG Fan CUI Hong-min ZONG Yi-zhong WANG Wen-bo |
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| Abstract: | In order to meet the requirements of engineering models. In the research of the capacitive thin film vacuum pressure sensor,solve problems of insulation isolation between sensitive probe case and sensor case, nonlinearity compensation of sensor output signals,full circuits temperature compensation of thermal zero point drift use capacitive thin film packaging structure,shell of sensor acts as a pole of the capacitor,calibration test is performed in measuring pressure range of(0. 1~100)Pa,0. 2% FS measurement precision is achieved. |
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| Keywords: | capacitive thin film vacuum pressure sensor zero point drift temperature compensation |
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