常压等离子体射流沉积ZnO及其传感特性研究

提出了一种环保、高效、低成本的传感器制作方法.应用等离子体射流喷枪沉积ZnO半导体材料,其中等离子体射流喷枪的气源为N2,电源采用输出频率为20 kHz的高频高压电源.使用Zn(NO3)2的水溶液作为前驱物,经过雾化装置形成气溶胶,气溶胶在等离子体的氛围中成功在衬底上沉积出一层ZnO半导体材料,通过XRD、SEM、UV-Vis等对其进行表征分析.并对基于该方法制备的ZnO湿度传感器性能进行表征.ZnO沉积时间为5 min时的灵敏度最高,低湿和高湿下分别为0.435 pF/% RH和19.634 pF/% RH,同时该样品的迟滞、响应时间与恢复时间亦是最优.

The application of ZnO thin film humidity sensor fabricated by atmospheric pressure plasma jet

The deposition of ZnO thin films by an atmospheric pressure plasma jet(APPJ)is presented.The APPJ is generated by an AC power source with a repetitive frequency up to 20 kHz using N2 as the plasma gas.And Zn(NO3)2 precursor solution for ZnO was sprayed into the downstream of the APPJ.With the optimized retention time and jet temperature,a nearly full conversion of the precursor solution to ZnO thin films had been conducted.The ZnO thin films were first characterized by XRD,SEM,UV-Vis and etc.Then,the humidity sensing characteristics such as sensitivity and hysteresis of resulted film was studied.The results indicated that the ZnO films with deposition time of 5 min has the sensitivity of 0.435 pF/% RH and 19.634 pF/% RH under the low and high humidity level.The lower hysteresis and the shorter response time was also obtained.