微机械轮式角振动陀螺气体阻尼特性研究

轮式角振动陀螺气体阻尼效应是影响其动态特性的主要因素。在充分研究轮式角振动陀螺结构特征的基础上，创建了角振动陀螺驱动模态滑膜阻尼数学解析模型，并给出了改进解析模型。利用有限差分算法求解极坐标系下雷诺方程，建立了敏感模态压膜阻尼简化分析模型。在5 Pa到105 Pa压强范围内，进行了简化分析模型计算，同时对计算结果进行了与ANSYS 仿真结果的比对。理论模型计算与仿真结果表明，敏感模态压膜阻尼是轮式角振动陀螺气体阻尼的主要产生机制。进而，从结构设计和控制电路的角度，给出了减小气体阻尼效应的有效方法。

Research on Air Damping of Micro-machined Wheel Angular Vibration Gyroscope

The air damping of Micro￣machined Wheel Angular Vibration Gyroscope is a main factor to influence the dynamic performance. A physical model is proposed and improved for the characterization of the slide film damping of drive mode based on adequate studies of the whole structure. A simplified model to calculate the squeeze film damping of sense mode is given by solving the Reynolds equation through the finite￣difference method. The formula￣tion is calculated in the 5 Pa~105 Pa range of pressure change,and the model is validated by comparing with the ANSYS results. The theoretical model computation and simulation results all shows that the squeeze film damping of sense mode is the main generation mechanism of the whole air damping in wheel angular vibration gyroscope. Effec￣tive ways to reduce the air damping effect is given from the perspective of structure design and circuit control.