基于LCP衬底的柔性湿度传感器研究

介绍了一种新型柔性电容式湿度传感器.该柔性电容式湿度传感器采用液晶高分子聚合物(LCP)作为衬底,金属铜(Cu)作为叉指电极,聚酰亚胺(PI)作为湿度传感器的湿敏介质.LCP衬底的应用使得该传感器具有良好的柔性和可弯曲性.该柔性湿度传感器与传统硅基湿度传感器相比较具有成本低廉、结构简单、制作方便等优点.该柔性湿度传感器在25℃下的平均灵敏度为0.04%pF/%RH,最大回滞为±4.16%RH,其平均灵敏度在25℃~70℃范围内受温度影响较小.在25℃下其响应时间和恢复时间分别为36 s和39 s.该柔性湿度传感器可以应用于环境湿度检测、人工电子皮肤系统和可穿戴设备等领域.

Research on a Flexible Humidity Sensor Based on LCP Substrate

Anovel flexible capacitive humidity sensor is presented . We took advantage of liquid crystal poly-mer(LCP)as the substrate,copper(Cu)interdigitated(IDT)structureas electrodes and polyimide as the sensing film.The senor is flexible with the aid of the LCP substrate. Compared with conventional humidity sensors based on silicon(Si)substrate the flexible humidity sensor has advantages of low cost,simple structure and easy fabrication process. Theaverage sensitivity and the maximum hysteresisof the humidity sensor are 0.04%pF/%RH and ±4.16%RH,respectivelyat 25 ℃. The average sensitivity of the humidity sensor is hardly affected by the temperature in the range of 25℃~70℃. In addition,the response time and recovery time of the flexible humidity sensor are 36 s and 39 s,respectively. This flexible humidity sensor can be applied in environmental humidity monitoring,artificial skin and wearable devices etc.