| 基于MEMS压力传感器阵列的浪涌检测技术研究 |
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| 引用本文： | 齐娜,付士民,王世宁,刘兴宇,陈丽洁.基于MEMS压力传感器阵列的浪涌检测技术研究[J].传感器与微系统,2017,36(6). |
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| 作者姓名： | 齐娜 付士民 王世宁 刘兴宇 陈丽洁 |
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| 作者单位： | 中国电子科技集团公司 第四十九研究所,黑龙江 哈尔滨,150001 |
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| 摘 要： | 提出了一种基于微机电系统(MEMS)压力传感器阵列的浪涌检测技术.通过在压力作用区域内布放MEMS压力传感器阵列,从而获取各测试点上的压力值,对这些压力值进行处理得到相应区域的压力变化趋势.经MEMS压力传感器阵列检测实验系统验证表明:此设计方案能够准确检测到浪涌信号,分辨出浪涌的方向及幅值变化.
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| 关 键 词： | 浪涌检测 阵列 信号处理 |
Research on surge detection technology based on MEMS pressure sensor array |
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| QI Na,FU Shi-min,WANG Shi-ning,LIU Xing-yu,CHEN Li-jie.Research on surge detection technology based on MEMS pressure sensor array[J].Transducer and Microsystem Technology,2017,36(6). |
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| Authors: | QI Na FU Shi-min WANG Shi-ning LIU Xing-yu CHEN Li-jie |
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| Abstract: | A surge detection technique based on MEMS pressure sensor array is introduced.Through placing MEMS pressure sensor array in pressure area,so as to obtain pressure value of each test point,these pressure values are processed to get the pressure change trend of the corresponding area.The MEMS pressure sensor array detection test system verify that this design scheme can accurately detect surge signal,distinguish direction and amplitude change of surge. |
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| Keywords: | surge detection array signal processing |
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