基于窄带水平集的三维平面工艺模拟系统

表面工艺是MEMS制造的一种重要方法,实现其加工过程的计算机仿真可以为相关MEMS工艺研究和器件开发提供技术支持,减少相关MEMS产品的开发成本,缩短其开发周期.基于窄带水平集算法完成了表面加工工艺的三维表面工艺模拟系统.窄带水平集算法稳定,计算速度快处理拓扑变形非常灵活,本文将其应用于该软件仿真系统中,并进行了一列的仿真实验,将仿真结果与实际的流片电镜图对比,验证了仿真系统的精确性.

A three-dimensional surface-miacromachining process simulation system based on the narrow band level set method

The surface micromachining process is a main manufacturing method for Micro-Electro-Mechanical-System(MEMS).A new system for three-dimensional(3-D)simulation for this process with multi-layer is presented.The surface evolution algorithm is based on the narrow band level set method,because it is stable and computation efficient and also can easily handle the topographic changes to certificate the accuracy of the simulation system.A serious of simulations have been designed and performed using this simulation system.Compared with the scanning electron microscopy(SEM)pictures,the simulation results of the micro-rotating structures were demonstrated to be accurate,efficient.The system provides cost-effective,proof-of-concept for the MEMS devices manufacture,reducing the design cycle.